Youth Fund Project of Central South Forestry University of Science and Technology [QJ2012011A]
机构署名：
本校为第一且通讯机构
院系归属：
机电工程学院
摘要：
Abstract
Silicon material is a widely used substrate in micro-electromechanical systems, and its micro-fabrication technology has always been a research hotspot. The main microfabrication methods of silicon material are chemical etching, electrochemical machining (ECM) and electrical discharge machining (EDM). The electrochemical and electrical discharge compound machining technology is a kind of machining method for non-conductive materials. In this paper, the compound machining technology was studied and applied to the microfabrication of silicon material. The machining principle of silicon...
