期刊论文

Research on temperature drift compensation of silicon capacitive high precision biax tilt angle sensor

中文

传感器与微系统

2096-2436

2019

38

7

43-45

10.13873/J.1000-9787(2019)07-0043-03

本校为第一机构

为了提高倾角传感器测量精度,提出了一种基于最小二乘多项式分段函数非线性曲线拟合温度漂移补偿方法。根据倾角传感器原理与温度漂移补偿特性,结合实验情况,建立两段分段函数温度漂移补偿模型,忽略其它粗大误差的影响,引入自变量温度,并固定角度,使用最小二乘法对实验采集的数据进行分析与处理。经实验证明:温度在-36 ~ 55℃范围内倾角传感器测量误差精度达到0.001°。该方法有效地提高了倾角传感器的测量精度,取得了良好的补偿效果。

In order to improve the measurement precision of the tilt angle sensor,a temperature drift compensation method based on the least square polynomial piecewise function nonlinear curve fitting is proposed. According to the principle of tilt angle sensor and the characteristic of temperature drift compensation,a two-segment function temperature drift compensation model is established,which ignores the influence of other gross errors,and introduces independent variable temperature and fixed angle. The least square method is used to analyze and proc...