Youth Fund Project of Central South Forestry University of Science and Technology [QJ2012011A]
机构署名：
本校为第一且通讯机构
院系归属：
机电工程学院
摘要：
Electrochemical machining (ECM) is a common method of silicon micromachining, but it is difficult to be directly used for three-dimensional processing. Therefore a new electrochemical micro-milling (ECMM) method is proposed. The method combined electrochemical machining and milling processes technology. Micro-removal of materials can be achieved by electrochemical machining technique, while milling processes enable three-dimensional machining. ECMM utilizes the passivation of silicon in sodium hydroxide solution to reduce electrochemical stray ...
