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Reusable microfluidic chip processed by femtosecond double-pulse-assisted polarization-selective etching in fused silica glass

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成果类型:
期刊论文
作者:
Dongkai Chu*;Weizhen Li;Shuoshuo Qu;Xinran Dong;Peng Yao
通讯作者:
Dongkai Chu
作者机构:
Center for Advanced Jet Engineering Technologies (CaJET), School of Mechanical Engineering, Shandong University, Jinan, People’s Republic of China
State Key Laboratory of High Performance and Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha, People’s Republic of China
Key Laboratory of High Efficiency and Clean Mechanical Manufacture, Shandong University, Ministry of Education, Jinan, People’s Republic of China
[Xinran Dong] College of Mechanical and Electrical Engineering, Central South University of Forestry and Technology, Changsha, People’s Republic of China
[Dongkai Chu] Center for Advanced Jet Engineering Technologies (CaJET), School of Mechanical Engineering, Shandong University, Jinan, People’s Republic of China<&wdkj&>State Key Laboratory of High Performance and Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha, People’s Republic of China<&wdkj&>Key Laboratory of High Efficiency and Clean Mechanical Manufacture, Shandong University, Ministry of Education, Jinan, People’s Republic of China
通讯机构:
[Dongkai Chu] C
Center for Advanced Jet Engineering Technologies (CaJET), School of Mechanical Engineering, Shandong University, Jinan, People’s Republic of China<&wdkj&>State Key Laboratory of High Performance and Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha, People’s Republic of China<&wdkj&>Key Laboratory of High Efficiency and Clean Mechanical Manufacture, Shandong University, Ministry of Education, Jinan, People’s Republic of China
语种:
英文
关键词:
Microfluidic chip;Femtosecond laser;Reusable;Micromixers;Droplet generator
期刊:
Journal of Optics
ISSN:
0972-8821
年:
2023
卷:
52
期:
1
页码:
216-223
机构署名:
本校为其他机构
院系归属:
机电工程学院
摘要:
Microfluidic chip, with the advantage of compact structure and low reagent consumption, has rapidly emerged as the key technologies in bio(chemical) analysis and materials generation. In this work, a facile method is presented to fabricate reusable microfluidic in fused silica glass using femtosecond double-pulse laser-assisted polarization-selective wet etching. Three methods of dark treatment, chemical treatment and static treatment are used to effectively control the wettability of the surface of microchannel to increase the reuse rate of th...

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