作者机构：
[Zhou Jian; Li Li-jun; Li Xin-hua] Ctr S Univ Forestry & Technol, Coll Machinery & Elect, Changsha 410004, Hunan, Peoples R China.;[Luo Yin-she; Yin Shui-ping] Ctr S Univ Forestry & Technol, Inst Rheol Mech & Mat Engn, Changsha 410004, Hunan, Peoples R China.;[Zhong Qi-wen] Ctr S Univ Forestry & Technol, Dept Teaching Affair, Changsha 410004, Hunan, Peoples R China.
通讯机构：
[Zhou Jian] C;Ctr S Univ Forestry & Technol, Coll Machinery & Elect, Changsha 410004, Hunan, Peoples R China.
会议名称：
第九届全国流变学学术会议
会议时间：
2008-09-28
会议地点：
长沙
会议论文集名称：
第九届全国流变学学术会议论文集
关键词：
Laser-induced chemical vapor deposition (LCVD);growing rapid;diameter;microcarbon
摘要：
Argon ion laser was used as the induced light source and ethane (C2H4) was selected as the precursor gas, in the variety ranges of laser power from 0.5 W to 4.5 W and the pressure of the precursor gas from 225×133.3 Pa to 680×133.3 Pa, the experiments of laser induced chemical vapor deposition were proceeded for fabrication of micro carbon pillar. In the experiments, the influences of power of laser and pressure of work gas on the diameter and length of micro carbon pillar were investigated, the variety on averaged growth rate of carbon pillar with the laser irradiation time and moving speed of focus was discussed. Based on experiment data, the micro carbon pillar with an aspect ratio of over 500 was built through the method of moving the focus.
作者机构：
[张汗灵; 张晓燕] College of Computer and Communication,, Hunan Univ., Changsha 410082, China;[李立君] College of Mechanical and Electrical Engineering, Central South University of Forestry and Technology, Changsha 410004, China
通讯机构：
College of Computer and Communication,, Hunan Univ., China
